結晶性セラミックス膜の英語

本発明の目的は、数ｎｍ〜数μｍの膜厚の薄膜を成膜する高精度の薄膜デバイス製造技術を適用しうる、高精度の平滑性を有するセラミックス多結晶基板やガラスセラミックス基板及び該基板の上に受動素子を形成した薄膜電子部品の製造方法を提供することである。例文帳に追加

To provide a ceramic polycrystal substrate and a glass ceramic substrate having smoothness of high precision to which a thin film device production technique of high precision, where a thin film with a film thickness of several nm to several μm is deposited, can be applied, and to provide a method for producing a thin film electronic component in which passive elements are formed on the substrate. - 特許庁

本発明の目的は、数ｎｍ〜数μｍの膜厚の薄膜を成膜する高精度の薄膜デバイス製造技術を適用しうる、高精度の平滑性を有するセラミックス多結晶基板やガラスセラミックス基板及び該基板の上に受動素子を形成した薄膜電子部品並びにそれらの製造方法を提供することである。例文帳に追加

To provide a ceramic polycrystalline substrate or a glass ceramic substrate to which a thin film device manufacturing technique at a high accuracy for forming a thin film having a film thickness of a few nm to several μm is applied, and which has smoothing properties at a high accuracy; to provide a thin film electronic part in which a passive element is formed on the substrate; and to provide their manufacturing method. - 特許庁

比較的高温で焼成した場合にも結晶粒が粗大化し難く、白金膜とほぼ同等の化学的安定性を有する導電膜を、基材に強固に固着形成せしめる導電性分散組成物、及びこれを用いて成る導電性セラミックス基材を提供すること。例文帳に追加

To provide an electrically conductive dispersed composition with which electrically conductive film having rather small crystal grain size and almost the same chemical stability as that of a platinum film is formed solidly on a base plate even when the electrically conductive dispersed composition is baked at rather high temperatures, and to provide an electrically conductive ceramic base plate using the electrically conductive dispersed composition. - 特許庁

液室基板１３を金属膜で形成された振動板１７と、ガラス又はセラミックスで形成された液室形成基板１８とで構成し、シリコン単結晶をアルカリ液による異方性エッチングすることなく液室基板１３を作製する。例文帳に追加

A liquid chamber substrate 13 comprises a diaphragm 17 made of a metal film, and a liquid chamber forming substrate 18 made of glass or ceramics wherein the liquid chamber substrate 13 is fabricated without subjecting silicon single crystal to anisotropic etching with alkaline liquid. - 特許庁

金属または合金を含む電極層３と、ビスマス層状化合物を含む誘電体層５との間に、同一の結晶面が膜面に対して平行な導電性セラミックスを含むバッファ層４を有するように積層体ユニット１０を構成する。例文帳に追加

The laminate unit 10 is constituted such that there is provided a buffer layer 4 involving conductive ceramics between an electrode layer 3 containing metal or alloy and a dielectric layer 5 containing a bismuth layered compound, with the conductive ceramics having the same crystal plane parallel to a film surface. - 特許庁

Ｓｉ基板１上に積層する発熱抵抗層３と配線電極４で構成される発熱素子８の保護膜としての絶縁層５を、熱伝導率の結晶方向依存性を示すセラミックス窒化アルミニウムを用いてＣＶＤ等の乾式成膜法で成膜する際に、電子シャワー法により配向薄膜化して熱伝導率に異方性をもたせる。例文帳に追加

When an insulating layer 5 as the protecting film for the heating element 8 constituted of a heating resistance layer 3 and a wiring electrode 4 layered on an Si substrate 1 is formed by a dry film formation method such as CVD with the use of ceramic aluminum nitride which shows the crystal orientation dependency of a thermal conductivity, the thermal conductivity is made anisotropic by orienting and forming thin the film by an electronic shower method. - 特許庁

エリスロポエチンまたはエリスロポエチンの誘導体様の生理活性を持つアミノ酸組成の異なる生理活性物質である薬剤成分を担持した金属イオン含有アパタイトナノ結晶の凝集構造からなる平均粒子径４０μｍ以下の多孔質微粒子の表面を、生分解性高分子薄膜で覆うことでセラミックス徐放製剤とする。例文帳に追加

A ceramic sustained release preparation is prepared by covering the surface of porous microparticles supporting a drug ingredient which is a physiologically active substance of different amino acid compositions having erythropoietin or an erythropoietin derivative-like physiological activity, and composed of an aggregation structure of metal ion-containing apatite nano-crystals having ≤40 μm average particle diameter, with a biodegradable polymer thin film. - 特許庁