charged particle distributionとは 意味・読み方・使い方

To realize highly accurate pattern lithography in a charged particle beam exposure device by detecting an intensity distribution of a radiated charged particle beam and controlling to make the distribution uniform.例文帳に追加

荷電粒子線露光装置において、照射荷電粒子線の強度分布を検出し、該分布を均一にするように制御することで、精度よいパターン描画を実現する。 - 特許庁

ANALYZING METHOD OF CHARGE DISTRIBUTION, ANALYZING METHOD OF ELECTROMAGNETIC FIELD, CHARGED PARTICLE OPTICAL SYSTEM, DESIGNING METHOD FOR IT, AND CHARGED PARTICLE BEAM DEVICE例文帳に追加

電荷分布の解析方法、電磁場解析方法、荷電粒子光学系の設計方法、荷電粒子光学系、および荷電粒子線装置 - 特許庁

To provide a charged particle beam drawing device and a charged particle beam drawing method which can automatically adjust the current density distribution during drawing.例文帳に追加

描画中の電流密度分布の自動調整が可能な荷電粒子ビーム描画装置および荷電粒子ビーム描画方法を提供する。 - 特許庁

To realize highly reliable exposure with charged-particle beams, by so evaluating the uniformity of the charged-particle beams even during their exposures as to make controllable properly the strength distribution of the charged-particle beams.例文帳に追加

露光中においても荷電粒子線の均一性を評価して荷電粒子線の強度分布を適切に制御することを可能とし、信頼性の高い荷電粒子線露光を実現する。 - 特許庁

Particle diameter distribution measuring means changes classification voltage by means of a voltage generation apparatus to measure detection signals of a particle measurement apparatus, thereby measuring the particle diameter distribution of the charged particle in sample gas.例文帳に追加

粒径分布測定手段は電圧発生装置により分級電圧を変化させて粒子計測器の検出信号を測定することにより試料ガス中の荷電粒子の粒径分布を測定する。 - 特許庁

To provide a charged particle beam exposure device that can always maintain a high-quality exposure pattern by inspecting the irradiating angle distribution of a particle source in advance, and to provide a charged particle beam forming mask and a method of inspecting a charged particle beam used for the exposure device.例文帳に追加

粒子源の放射角分布を事前に検査し常に高品質な露光パターンを維持することが可能な荷電粒子線露光装置と、これに用いる荷電粒子線成形マスク、および荷電粒子線検査方法を提供する。 - 特許庁

To provide a charged-particle beam writing method and a charged-particle beam writing apparatus capable of calculating a distribution of a beam position shift amount due to a charging effect with satisfactory accuracy.例文帳に追加

帯電効果によるビーム位置ずれ量分布を精度良く算出することが可能な荷電粒子ビーム描画方法及び荷電粒子ビーム描画装置を提供する。 - 特許庁

To more accurately measure charged amount distribution of particles held by particle holding carriers of various shapes.例文帳に追加

様々な形状の粒子保持担体に保持された粒子の帯電量分布を、より正確に測定する。 - 特許庁