faultinessesとは 意味・読み方・使い方

To provide an optical semiconductor device wherein its substrate and cover member are so bonded surely to each other even when using different members from each other as its substrate and cover member so as to prevent their exfoliations and bonding faultinesses, etc.例文帳に追加

基板と蓋部材として異なる部材を用いた場合でも、基板と蓋部材とを確実に接着し、剥離や接着不良などを防止した光半導体装置を提供する。 - 特許庁

Also, in this structure and its manufacturing method, there are so generated hardly recessed portions in the upper portion of the gate present in the trench when etching it for forming a gate as to make avoidable the faultinesses of an operation and a reliability caused by the recessed portions.例文帳に追加

また、この構造及び製造方法ではトレンチ内ゲート上部にゲート形成のためのエッチング時に生ずる凹部が発生しにくく、この凹部に基づく動作不良や信頼性不良を回避することができる。 - 特許庁

To provide an electrostatic chuck and a method for separating an attracted object from it wherein the necessary attraction force for the attraction and hold of such an attracted object as a wafer is prevented from damaging, and such faultinesses as the jump and half-lift of the attracted object are eliminated when separating the attracted object from the electrostatic chuck, and further, the attracted object can be carried stably.例文帳に追加

ウエハ等の被吸着物の吸着保持に必要な吸着力を損なうことがない上に、被吸着物の離脱時における被吸着物の跳ねや片上がり等の不具合もなく、被吸着物の安定した搬送を可能とする、静電チャック及び静電チャックにおける被吸着物離脱方法の提供を課題とする。 - 特許庁