等測投影の英語

投影光学系の開口数が増大しても投影光学系からの露光光を受光して、各種の計測を行うことができる露光装置等を提供する。例文帳に追加

To provide an exposing device or the like which can perform various kinds of measurements by receiving exposing light from a projection optical system even when the number of aperture of the projection optical system increases. - 特許庁

振動ミラーにより光ビームを走査することで対象物上に光のパターンを投影する三次元形状計測装置において、投影する光のパターンの環境条件等による変化を補償する。例文帳に追加

To compensate, in a three-dimensional shape measuring apparatus which projects a light pattern onto an object by scanning a light beam with a vibrating mirror, for variations attributable to the environmental conditions of the projected light pattern among other factors. - 特許庁

次に、投影光学系４０を計測装置２１０にセットし、各部分投影光学系ＰＬ１〜ＰＬ７の相対位置や姿勢の調節等を行って結像特性の相対アライメント（粗調整）を行う。例文帳に追加

Then, the projection optical system 40 is set in a measuring device 210, and relative positions and postures of respective partial projection optical systems PL1-PL7 are regulated, etc., and a relative alignment (coarse regulation) of image forming characteristics is performed. - 特許庁

投影光学系の開口数が増大しても投影光学系からの露光光を受光して、各種の計測を行うことができる露光装置等を提供する。例文帳に追加

To provide an exposure device and the like capable of performing various measurements by receiving exposure lights from a projection optical system even when a number of apertures of the projection optical system increases. - 特許庁

投影光学系のベストフォーカス位置や非点収差等を迅速かつ精度良く検出することができる計測方法を得ること。例文帳に追加

To obtain a measuring method whereby the best focus position, astigmatism, etc., of a projection optical system are quickly and accurately detected. - 特許庁

液浸法で露光を行う場合に、投影光学系とウエハ等の基板との位置関係を正確に計測できる露光技術を提供する。例文帳に追加

To provide an exposure technology for accurately measuring a position relationship between a projection optical system and a substrate such as a wafer when performing exposure by an immersion method. - 特許庁

投影パタ−ンの縞等の間隔を変更可能にし、被計測物体の３次元形状を所望の精度で検出する。例文帳に追加

To detect the three-dimensional shape of an object to be measured with a desired accuracy by making changeable the interval of a projection pattern. - 特許庁

再構成演算部２７は、投影像の一群と計測された３次元位置とに基づいて、断層像等を作成する。例文帳に追加

A reconstruction calculating part 27 forms tomographic images and the like based on one group of projected images and the measured three-dimensional position. - 特許庁