after the end edとは 意味・読み方・使い方

In this method for detecting an etching end point, only a signal change based on an etching reaction in each etching cycle is extracted, a discontinuous location in a waveform corresponding to the extracted signal change is continuously corrected with the use of a first correction waveform and then a second correction waveform CW2 to detect an etching end point ED, based on a continuos waveform after correction.例文帳に追加

各エッチングサイクルにおけるエッチング反応に基く信号変化だけを取り出すとともに、取出した信号変化に相応する波形の不連続個所を第１補正波形、次いで第２補正波形ＣＷ２によって連続させる補正を行い、補正後の連続波形よりエッチング終点ＥＤを検出する。 - 特許庁