effective permittivityとは 意味・読み方・使い方

To provide composition which is effective in forming an insulating film of low permittivity which can realize a semiconductor device of high level integration and high speed, and to provide a semiconductor device of high speed and high reliability which includes an insulating film which is obtained by using the composition and has low permittivity and high mechanical strength.例文帳に追加

高集積化し且つ高速の半導体装置の実現を可能にする低誘電率の絶縁膜の形成に有効な組成物と、これを使って得られる低誘電率且つ機械的強度の高い絶縁膜を含む高速且つ高信頼性の半導体装置を提供すること。 - 特許庁

By adjusting the thickness of the low-k CMP protective layer 5, it is possible to respond to a large change in the CMP process without seriously affecting the effective permittivity of a structure 9.例文帳に追加

低ｋＣＭＰ保護層５の厚さを調節して当該構造９の有効誘電率に著しい影響を与えることなしにＣＭＰプロセス内の大きな変化に対応できる。 - 特許庁

The phase shifter delays a phase of a signal by controlling effective permittivity of the substrate using an air gap, thereby having outstandingly low insertion loss as compared with existing phase shifters.例文帳に追加

このように、空気空隙によって基板の効果誘電率を調節して、信号の位相を遅延させることにより、従来の移相器に比べて画期的に少ない挿入損失を持つ。 - 特許庁

The perforated areas (104) are generally aligned with one another in the stack to lower one or more of an effective value of a permittivity and a loss tangent in a least one spatially defined region (504) of the substrate (300).例文帳に追加

有孔エリア（１０４）は、基板（３００）の少なくとも１つの空間的に定義された領域（５０４）における誘電率及び損失正接の実効値の１以上を下げるために、スタックにおいて互いに略揃えられる。 - 特許庁

This protection hard mask has a one- or two-layer sacrificial hard mask that is especially effective, when interconnection structure such as a via opening and/or a line is formed between low-permittivity materials, while a final product is manufacture.例文帳に追加

保護ハードマスクは、最終製品を製造する際に、バイア開口および／またはラインのような相互接続構造が、低誘電率材料間に形成されるときに特に有効な１層または２層の犠牲的ハードマスクを備える。 - 特許庁

A phase shifter includes: a signal line 104 formed at a prescribed position on a substrate 100; and an air gap 108 which is formed within the substrate and changes effective permittivity of the substrate to delay a phase of a signal supplied to the signal line.例文帳に追加

移相器は、基板１００の所定の位置に形成された信号ライン１０４と、基板内に形成され、基板の効果誘電率を変化させ、信号ラインに誘起された信号の位相を遅延させる空気空隙１０８を含む。 - 特許庁

When the electromagnetic waves arrive, an electric charge is stored in the opposite parts of the conductive films 24, a stored electric charge amount is increased further by the Coulomb force generated by the electric charge, and the effective relative permittivity between the matching film 16 and the reflecting film 18 is increased.例文帳に追加

電磁波が到来すると、導電膜24の対向部分に電荷が蓄積されると共に該電荷によって発生するクーロン力により蓄積電荷量が更に増大し、整合膜16と反射膜18の間の実効比誘電率が増大する。 - 特許庁

To provide a method for preparing an organic polymer film, having high adhesiveness on the interface with other semiconductor material which comes into contact with the lower surface or higher surface of the film when utilized as an interlaminar insulating film constituting a semiconductor device and enabling further reduction of effective permittivity of the whole film.例文帳に追加

半導体装置を構成する層間絶縁膜として利用する際、その下面、上面と接する他の半導体材料との界面においては、高い密着性を有し、また、膜全体の実効的な比誘電率の更なる低減が可能な有機高分子膜の作製方法を提供。 - 特許庁