surface catalysisとは 意味・読み方・使い方

The structure of the catalyst is formed so that a plurality of catalyst fine particles, each of which is obtained by growing the carbon nanotube and has catalysis, are distributed on the surface of the substrate in flat shapes the planar diameter of each of which is made longer than the height thereof from the substrate.例文帳に追加

基板表面に、カーボンナノチューブを成長させる触媒作用を有する複数の触媒微粒子が、基板上からの高さと比較してその平面径が大きくなった扁平な形状で分布した触媒構造。 - 特許庁

By utilizing the catalysis of the metal of the internal electrode 2 during the baking process, the heterogeneous metal sticking to the end part surface of the internal electrode is made to diffuse into the interface between the ceramic layer 1 and the internal electrode 2 with the internal electrode as a path, to fill a void 3 and a metal 5.例文帳に追加

この焼付過程で内部電極２金属の触媒作用を利用し、前記内部電極端部表面に付着させた異種金属を内部電極を経路としてセラミック層１と内部電極２の界面に拡散させ、空隙３を金属５で充填する。 - 特許庁

To form a preferred shape pattern on a chemically-amplified positive resist applied to a substrate before or after immersion exposure by exposing the resist before heating to cause an acid catalysis only on the surface of the resist.例文帳に追加

化学増幅型ポジレジストが塗布され、そのレジストにパターンを形成するために液浸露光が行われる前あるいは行われた後の基板について、そのレジストの表面のみを酸触媒反応を起こすための加熱処理前に露光して、良好な形状のパターンを形成すること。 - 特許庁

At the time of growing the oxide thin film on the surface of a substrate by jetting at least a material gas and an oxidation gas to the substrate, together with heating the substrate arranged in a reaction chamber, the initial oxidation film is deposited on the surface of the substrate before the substrate is risen up to a temperature at which the temperature rise is occurred by catalysis.例文帳に追加

成膜室内に配置された基板を加熱しつつ、該基板に向けて少なくとも原料ガスと酸化ガスとを噴出させて基板表面に酸化物薄膜を成長させるにあたり、原料ガス及び／または酸化ガスにより基板が触媒作用で温度上昇を起こす温度まで上昇する前に、基板の表面に初期酸化膜を成膜する。 - 特許庁

To provide a metal nanoparticle the surface area of which is extremely larger in comparison with the volume thereof, which produces big results such as catalysis according to the purposes, the size and shape of which in a colloidal state can be stably controlled and which can be produced at a low cost including a material cost.例文帳に追加

金属ナノ粒子の表面積がその体積に比してきわめて大きく、触媒作用などその使用目的におけるナノ粒子としての作用効果が大きく、コロイド状態での粒子サイズと形状を安定に制御でき、材料費も含めた製造コストの安い金属ナノ粒子を提供する - 特許庁

The hydrogen containing water vapor is supplied to a main surface of a semiconductor wafer 1A heated at a predetermined temperature or to its neighborhood to improve a profile of the side wall end of the gate electrode, then, the water is produced by reacting the hydrogen contained in the exhaust gas after oxidation treatment and the oxygen introduced from outside through catalysis, and discharged.例文帳に追加

そして、所定の温度に加熱された半導体ウエハ１Ａの主面またはその近傍に水蒸気を含む水素ガスを供給してゲート電極の側壁端部のプロファイルを改善した後、酸化処理後の排ガスに含まれる水素と外部より導入した酸素とを触媒作用によって反応させて水を生成し、排出する。 - 特許庁