rate of evaporationとは 意味・読み方・使い方

To increase the evaporation rate of the material and to improve the film deposition speed.例文帳に追加

材料の蒸発レートを稼ぎ、成膜スピードを向上させる。 - 特許庁

To provide a vapor deposition method and a vapor deposition equipment where, in vapor deposition for an organic compound, bumping and the change of an evaporation rate are prevented, and evaporation is performed at a fixed evaporation rate stably for a long period of time.例文帳に追加

有機化合物の蒸着において、突沸や蒸発速度の変化を防止し、長時間安定的に一定蒸発速度で蒸発を行う蒸着方法および蒸着装置を提供する。 - 特許庁

To provide an evaporation rate measuring method and an evaporation characteristic measuring method capable of measuring quantitatively and quickly an evaporation rate or the like of a liquid.例文帳に追加

液体の蒸発率等の測定を定量的且つ迅速に行なうことのできる蒸発率の測定方法及び蒸発特性の測定方法を提供する。 - 特許庁

In this semiconductor manufacturing apparatus, gas flow rate controllers 11A, 11B are provided between an evaporation-polymerizing chamber 3, and monomer evaporation sources for controlling the feed rates of raw material monomers A, B are provided for the evaporation-polymerization into the evaporation-polymerizing chamber 3 which has evaporation sources of the raw material monomers A, B.例文帳に追加

半導体製造装置において、蒸着重合用原料モノマーの蒸発源を備える蒸着重合室へ導入される該モノマーの導入量を制御するために、気体流量コントローラーを該蒸着重合室と該モノマー蒸発源との間に設ける。 - 特許庁

To provide a gel-like resin molded article received in a receiver having a function for controlling the evaporation rate and evaporation-sustaining period of allyl isothiocyanate.例文帳に追加

イソチオシアン酸アリルの揮散速度及び揮散持続期間を調節する機能を備えた収納体入りのゲル状樹脂成形体を提供する。 - 特許庁

METHOD FOR ADJUSTING EVAPORATION RATE OF AROMATIC COMPOUND BY UTILIZATION OF CRYSTALLIZATION CHARACTERISTIC WITH SURFACTANT例文帳に追加

界面活性剤との結晶化を利用した芳香族化合物の気化速度を調節する方法 - 特許庁

It is preferable that a plurality of film thickness monitors are used to measure the evaporation rate profile.例文帳に追加

前記蒸着速度分布を複数の膜厚モニターを用いて計測することが望ましい。 - 特許庁

The evaporation rates of the sulfides are monitored with separate coating rate monitors that are shielded from each other.例文帳に追加

硫化物の蒸発率は各々別に遮断された膜率モニタで監視する。 - 特許庁