L-Oxとは 意味・読み方・使い方

Copper wiring lines are made of a Cu film 209 in an interlayer insulating film consisting of an L-Ox film 203 and an SiO_2 film 204.例文帳に追加

Ｌ−Ｏｘ膜２０３およびＳｉＯ_２膜２０４が積層した層間絶縁膜中にＣｕ膜２０９からなる銅配線を形成する。 - 特許庁

A first camera 201 and a second camera 202 of at least one with an optical axis parallel to the first axis Ox of an orthogonal mark are interposed, and the first and second cameras are planned positionedly to indicate the first shift L along the second axis Ox of orthogonal marks, and the second shift H along the third axis Ox.例文帳に追加

直交するマークの第１軸Ｏｘと平行な光軸の、少なくとも１つの第１カメラ２０１と、第２カメラ２０２を介在させ、第１及び第２カメラは、直交するマークの第２軸Ｏｙに沿った第１のずれＬと、第３軸Ｏｚに沿った第２のずれＨを示すように位置決めされることが予定される。 - 特許庁

The L-Ox film 203 has a stabilized film thickness and film characteristics because it has a ladder hydrogenated siloxane structure, and the film quality does not change during the fabrication process.例文帳に追加

Ｌ−Ｏｘ膜２０３は梯子型水素化シロキサン構造を有するため膜厚や膜特性が安定であり、製造プロセス中に膜質が変化することが少ない。 - 特許庁

In this case, the second insulating film between wires 216 and the second protection film 217 are composed of, for example an L-Ox^TM film (R) and a silicon oxide film, respectively.例文帳に追加

ここで、第二配線間絶縁膜２１６はたとえば、Ｌ−Ｏｘ^ＴＭ（商標）膜により構成され、第二保護膜２１７はたとえばシリコン酸化膜により構成される。 - 特許庁

The center line surface roughness Ra is measured by using a high precision surface roughness meter OO produced by XX manufacturing Co. Ltd. and a chart is drawn under the condition of cut-off value 0.08mm and OX, according to JIS B0601. A portion of measured length L is cut out from a film surface roughness curve to the direction of the center line. When the center line of the portion is expressed as an X axis, the vertical direction is expressed as a Y axis, and a roughness curve is expressed as Y = f (X), the value obtained from the following expression is Ra (μm).発音を聞く 例文帳に追加

中心線表面粗さRaはJIS B0601に準じ、(株)××製作所の高精度表面粗さ計○○を用いて測定し、カットオフ0.08mm、及び○×の条件下にチャートを書かせ、フィルム表面粗さ曲線からその中心線の方向に測定長さＬの部分を抜き取り、その抜き取り部分の中心線をＸ軸、縦方向をＹ軸として粗さ曲線をＹ＝ｆ(Ｘ)で表したとき、次の式で得られた値をμm単位で表す。 - 特許庁