accelerated exposureとは 意味・読み方・使い方

To provide an accelerated weathering resistant testing method whose correlativity with respect to an exposure to weather is high and whose testing time is shortened.例文帳に追加

自然曝露との相関性が高く、試験時間を大幅に短縮することができる促進耐候性試験方法を提供する。 - 特許庁

When reduction projecting exposure is conducted by a scanning exposure system, large acceleration is required for the stage RST, and hence the stage RST at a scanning exposure time and a wafer stage WST can be highly accelerated at its speed, and the throughput can be improved by shortening the scanning exposure time.例文帳に追加

走査露光方式により縮小投影露光を行う場合は、レチクルステージＲＳＴに大きな加速度が要求されるので、走査露光時のレチクルステージＲＳＴとウエハステージＷＳＴの高加速度化、高速化が可能となり、走査露光時間の短縮によりスループットの向上が可能である。 - 特許庁

An exposure method in which scan and exposure are performed while a reticle 16 as a master and a wafer 18 as a substrate are held by their respective stages 15 and 17 and synchronized with each other wherein the exposure is also performed when the respective stage 15 and 17 for performing two-dimensional scannings are accelerated/decelerated in speed.例文帳に追加

原版としてのレチクル１６及び基板としてのウエハ１８を各々のステージ１５，１７に保持して同調させながら走査し露光を行う露光方法であって、２次元の走査をする各ステージ１５，１７が加減速している際にも露光を行う。 - 特許庁

To provide an accelerated deterioration testing method enhanced in a correlation with outdoor exposure with respect to a sealing material containing polyether based polyurethane, and to provide a deterioration degree evaluation method of high precision.例文帳に追加

ポリエーテル系ポリウレタンを含んでなるシーリング材について、屋外暴露と相関性の高い促進劣化試験方法を提供し、かつ精度の高い劣化度評価方法も併せて提供する。 - 特許庁

To provide a method for estimating the shape of resist pattern, by which the quantity of accumulated energy can be easily and accurately obtained in a highly accelerated electron beam exposure area, and its calculation time is not made longer and a memory of a calculator is not made larger.例文帳に追加

50keV以上の高加速電子線露光領域においてもエネルギー蓄積量を正確かつ簡単に求めることができ、計算時間や計算機メモリが大きくならないレジストパターン形状の推定方法を提供する。 - 特許庁

To reproduce not only the "discoloration" or "fading" of a coating film in outdoor exposure, but also the "crack" and "peel off" of the coating film with high precision in a test for the accelerated deterioration of the coating film.例文帳に追加

塗膜の促進劣化試験において、屋外暴露での塗膜の「変色」又は「退色」のみならず、塗膜の「割れ」及び「剥離」を高い精度で再現可能とする。 - 特許庁

To provide a method for generating a charged particle beam such as an electron beam, etc. for focusing the electron beam by suppressing the diffusion of the electron beam due to a space charge effect even when an electron density in the electron beam is increased and even when an exposure speed is accelerated, and to provide a charged particle beam device.例文帳に追加

電子ビーム中の電子密度を増加させても露光速度を上げても、空間電荷効果による電子ビームの拡散を抑制して電子ビームを集束させる電子ビーム等の荷電粒子線の発生方法および荷電粒子線装置を提供する。 - 特許庁

To provide an electron source which is used for a semiconductor wafer inspection device such as a scanning or transmission electron microscope, a surface analyzer like an Auger electron spectroscopic analyzer, an electron beam exposure apparatus, especially a scanning electron microscope using an electron beam accelerated with low voltage of 1 kV or less, a CD SEM, or a DRSEM.例文帳に追加

走査型又は透過型電子顕微鏡、オージェ電子分光装置等の表面分析装置、電子線露光機、特に、電子ビームの加速電圧が１ｋＶ以下の低加速で用いられる走査型電子顕微鏡、ＣＤ ＳＥＭ、ＤＲＳＥＭ等の半導体ウェハ検査装置に用いられる電子源を提供する。 - 特許庁