暴露室の英語

半導体デバイス作製時の基板前処理洗浄工程おいて、基板温度を室温から1200℃の範囲に保ち、基板表面に紫外線を照射しつつオゾン暴露を行う。例文帳に追加

In the substrate pretreatment washing process when semiconductor devices are prepared, a substrate temperature is maintained from the room temperature to 1200°C, and ultraviolet rays are applied onto the substrate surface for carrying out ozone exposure. - 特許庁

特定ガス成分透過度を測定すべきフィルム材料２２は、その中央部分をガス流動室１０，１２に暴露させた状態で対向端面９，１１間に挟圧される。例文帳に追加

The film material 22 to be subjected to measurement of specific gas constituent permeability is clamped and pressed between the opposite end faces 9 and 11 having central parts exposed to the gas flow chambers 10 and 12. - 特許庁

プラズマに暴露されにくい処理室内の領域においても、効率的に付着物を除去することが可能なプラズマ処理装置およびそのクリーニング方法を提供する。例文帳に追加

To provide a plasma processing apparatus which can efficiently remove attached substances even in an area within a processing chamber that is hard to be exposed to plasma, and to provide a cleaning method therefor. - 特許庁

硬化特性に優れた二酸化鉛の使用状況下において、屋外暴露後の変色も表面ひび割れも生ずることのない室温硬化性ポリサルファイド組成物を提供する。例文帳に追加

To provide a room temperature curable polysulfide composition which does not cause discoloration and surface cracks after outdoor exposure though it contains lead dioxide as an excellent curing agent. - 特許庁

硬化後、難燃性に優れ、高温に長時間暴露しても難燃性が低下し難いシリコーン硬化物となり得る縮合反応により硬化する室温硬化性オルガノポリシロキサン組成物を提供する。例文帳に追加

To provide a room-temperature-curable organopolysiloxane composition, which is cured by a condensation reaction, exhibits excellent flame retardancy after curing, and produces a silicone cured material hardly deteriorating its flame retardancy even by a long-period exposure to high temperature. - 特許庁

成膜室を大気中に暴露させる必要がなく、しかも校正作業が容易となる気相成長装置の温度計の校正方法及び温度校正用の半導体基板を提供する。例文帳に追加

To provide a calibration method of a thermometer of a vapor phase growth device, whereby a film forming chamber is not required to be exposed to the atmosphere and calibration work becomes easy, and to provide a semiconductor substrate for temperature calibration. - 特許庁

高耐久性と高感度特性を維持し、白ポチの発生が無く、且つ室内光に暴露されてもハーフトーン画像部に濃度差が生じない電子写真感光体の提供。例文帳に追加

To provide an electrophotographic photoreceptor which retains high durability and high sensitivity characteristic, avoids occurrence of white spots, and produces no density difference in a halftone image portion even if exposed to indoor light. - 特許庁

少なくとも一部にＣｌＦ_３が暴露されることによるフッ化物の皮膜が形成されている金属材料により構成される反応室１１と、前記反応室１１に接続されている前記金属材料からなる配管１３とを備える装置を構成する。例文帳に追加

The apparatus comprises: a reaction chamber 11 formed from a metallic material which has a coating film of a fluoride formed on at least a part of the metallic material by being exposed to ClF_3; and a pipe 13 which is connected to the reaction chamber 11 and is formed from the metallic material. - 特許庁