GASEとは 意味・読み方・使い方

A manufacturing method of the semiconductor device, in which a semiconductor substrate 100 is etched by using a photoresist 102 including sulfur, in the manufacturing method of the semiconductor device including a dry etching process using a chlorine gase.例文帳に追加

塩素系ガスを用いるドライエッチング工程を含む半導体素子の作製方法において、硫黄を含むフォトレジスト102を用いて半導体基体100をエッチングすることを特徴とする半導体素子の作製方法。 - 特許庁

When GaSe crystal having refractive index anisotropy is used as the nonlinear optical crystal, incident light is made incident almost in parallel to a refractive index principal axis to generate the terahertz electromagnetic wave.例文帳に追加

非線形光学結晶として屈折率異方性を有するＧａＳｅ結晶を用いる場合、屈折率主軸に対し、入射光を平行に近い角度で入射させることによりテラヘルツ電磁波を発生させる。 - 特許庁

In clarification of NOx included in an exhausted gas, hydrocarbons included in an exhausted gase emitted from an internal-combustion engine are removed prior to a catalyst-using a stage in which NOx is clarified with CO as a reducing agent.例文帳に追加

排ガス中のＮＯｘを浄化する方法において、内燃機関からの排ガスに含まれる炭化水素を、ＣＯを還元剤としてＮＯｘを浄化する触媒の前段で除去する。 - 特許庁

To provide the technology capable of efficiently decomposing a gase ous halogenated aliphat hydrocarbon compound by a convenient device constitu tion and also hardly causing the problem of the secondary polluting due to decomposition product and excellent in environmental protection.例文帳に追加

気体状ハロゲン化脂肪族炭化水素化合物の分解方法において、簡便な装置構成で効率良く分解でき、かつ分解生成物による２次汚染の問題等のない環境にやさしい技術を提供する。 - 特許庁

To perform reliable determination when gas appliances having a greatly varying and large quantity of flow are used by preventing incorrect detection due to determined difference data when the flow rate of gase has not been stabilized immediately after the gas appliances are actuated.例文帳に追加

ガス器具起動直後のガス流量が安定しないときに、求められた差分データで誤検知することをなくし、変動の大きい大流量器具使用時の判別をより確実にする。 - 特許庁

The system has a vacuum chamber 1, a holder for a substrate 5 to be subjected to film deposition disposed in the vacuum chamber 1, a hole 8b for introducing the material gase for film deposition, a catalytic body 9 for accelerating reactions for film deposition, and a high frequency induction heating device for heating the catalytic body 9.例文帳に追加

真空容器１と、該真空容器１内に配置された被成膜基体５用支持体と、成膜用ガス導入口８ｂと、成膜のための反応を促進するための触媒体９と、該触媒体９を加熱するための高周波誘導加熱装置とを具備したことを特徴とする。 - 特許庁

As the crystal for tetrahertz electromagnetic wave generation, GaSe crystal is used, the pump light and signal light are put together by a cube type polarizing element to have nearly the same beam paths, and the optical axis of an output tetrahertz wave is displaced in parallel by a prescribed distance according to variation in angle that the crystal and the optical axis contain to maintain the same optical path at any time.例文帳に追加

テラヘルツ電磁波発生用結晶としてＧａＳｅ結晶を用い、ポンプ光と信号光をキューブ型偏光素子を用いてほぼ同一のビーム路となるよう合成して入射し、結晶と前記光軸の成す角度の変化に応じて出力テラヘルツ波の光軸を所定距離だけ平行に変位させ、常に同一の光路を維持する。 - 特許庁